Lithographic apparatus and device manufacturing method

ABSTRACT

In an immersion lithographic apparatus, a closing plate is used to contain liquid in a liquid confinement structure while, for example, substrates are swapped on a substrate table. A closing plate displacement mechanism using, for example, a combination of one or more leaf springs and one or more electromagnets or a combination of one or more linear actuators and one more pins, is used to move the closing plate toward or from the liquid confinement structure. In an embodiment, an adjustment plate is used to compensate for closing plates of varying thickness in closing plate receptacles of varying depth on different substrate tables.

FIELD

The present invention relates to a lithographic apparatus and a devicemanufacturing method.

BACKGROUND

A lithographic apparatus is a machine that applies a desired patternonto a substrate, usually onto a target portion of the substrate. Alithographic apparatus can be used, for example, in the manufacture ofintegrated circuits (ICs). In that instance, a patterning device, whichis alternatively referred to as a mask or a reticle, may be used togenerate a circuit pattern to be formed on an individual layer of theIC. This pattern can be transferred onto a target portion (e.g.comprising part of, one, or several dies) on a substrate (e.g. a siliconwafer). Transfer of the pattern is typically via imaging onto a layer ofradiation-sensitive material (resist) provided on the substrate. Ingeneral, a single substrate will contain a network of adjacent targetportions that are successively patterned. Known lithographic apparatusinclude so-called steppers, in which each target portion is irradiatedby exposing an entire pattern onto the target portion at one time, andso-called scanners, in which each target portion is irradiated byscanning the pattern through a radiation beam in a given direction (the“scanning”-direction) while synchronously scanning the substrateparallel or anti-parallel to this direction. It is also possible totransfer the pattern from the patterning device to the substrate byimprinting the pattern onto the substrate.

It has been proposed to immerse the substrate in the lithographicprojection apparatus in a liquid having a relatively high refractiveindex, e.g. water, so as to fill a space between the final element ofthe projection system and the substrate. The point of this is to enableimaging of smaller features since the exposure radiation will have ashorter wavelength in the liquid. (The effect of the liquid may also beregarded as increasing the effective NA of the system and alsoincreasing the depth of focus.) Other immersion liquids have beenproposed, including water with solid particles (e.g. quartz) suspendedtherein.

However, submersing the substrate or substrate and substrate table in abath of liquid (see, for example, United States patent U.S. Pat. No.4,509,852, hereby incorporated in its entirety by reference) means thatthere is a large body of liquid that must be accelerated during ascanning exposure. This requires additional or more powerful motors andturbulence in the liquid may lead to undesirable and unpredictableeffects.

One of the solutions proposed is for a liquid supply system to provideliquid on only a localized area of the substrate and in between thefinal element of the projection system and the substrate (the substrategenerally has a larger surface area than the final element of theprojection system). One way which has been proposed to arrange for thisis disclosed in PCT patent application WO 99/49504, hereby incorporatedin its entirety by reference. As illustrated in FIGS. 2 and 3, liquid issupplied by at least one inlet IN onto the substrate, preferably alongthe direction of movement of the substrate relative to the finalelement, and is removed by at least one outlet OUT after having passedunder the projection system. That is, as the substrate is scannedbeneath the element in a −X direction, liquid is supplied at the +X sideof the element and taken up at the −X side. FIG. 2 shows the arrangementschematically in which liquid is supplied via inlet IN and is taken upon the other side of the element by outlet OUT which is connected to alow pressure source. In the illustration of FIG. 2 the liquid issupplied along the direction of movement of the substrate relative tothe final element, though this does not need to be the case. Variousorientations and numbers of in- and out-lets positioned around the finalelement are possible, one example is illustrated in FIG. 3 in which foursets of an inlet with an outlet on either side are provided in a regularpattern around the final element.

Once a substrate has been exposed, it is necessary to remove it and swapit with the next substrate to be exposed. In an immersion lithographyapparatus, it is typically undesirable to empty the system of theimmersion liquid in order to remove the substrate and then refill itwhen the next substrate is in place. This is because drying of andrewetting the projection system (typically the last optical elementthereof closest to the substrate) may take a long time and so possiblyreduce throughput of substrates through the apparatus. Additionally oralternatively, emptying and refilling may increase the probability ofdry spots or gas bubbles forming on the projection system and disturbingthe projection beam as it passes through the projection system into theliquid.

SUMMARY

Accordingly, it would be advantageous, for example, to keep theprojection system wet during, for instance, substrate swap (i.e.,removal of a substrate and replacement with a new substrate).

According to an embodiment of the invention, in order to keep the lastoptical element of the projection system wet, a closing plate is used toduring the execution of the substrate swap. During the exposure of asubstrate, the closing plate is kept on the substrate table in its ownreceptacle. The closing plate has a depth about equal to the depth ofthe receptacle ill the substrate table. The closing plate works byreplacing the substrate below a liquid confinement structure. To dothis, the liquid confinement structure is transferred from beingpositioned adjacent to the substrate to being adjacent the closingplate. In an implementation, the liquid confinement structure then movesdownward to meet the closing plate and/or the substrate table, includingthe closing plate in its receptacle, moves up to meet the liquidconfinement structure. The closing plate then may be attached to theliquid confinement structure by, for example, vacuum or magnetic force.The closing plate may be removed from the liquid confinement structureby reversing the above steps.

Loading and unloading the closing plate in this manner may result in alarge force applied between the liquid confinement structure and theclosing plate because of the respective velocity of the liquidconfinement structure and/or the closing plate and the large mass of thesubstrate table. A collision with this sort of force may disturb theframe holding the liquid confinement structure (and so may disturb theaccuracy of one or more measurement devices attached to or using theframe) and may cause mechanical damage. Furthermore, throughput ofsubstrates through the apparatus may be influenced by a slow velocity ofthe substrate table and/or the liquid confinement structure which mayneed to be employed in order to reduce the force of an impact betweenthe liquid confinement structure and the substrate table holding theclosing plate.

Further, use of a closing plate loading and unloading system may meanthat the closing plate receptacles on different substrate tables must beable to accommodate more than one size of closing plate. A closing platethat has a depth that matches the depth of one receptacle may not beexactly the right depth for another receptacle. If a closing plate doesnot fit in the receptacle properly so that its upper surface issubstantially level with the upper surface of the substrate table, therisk of a damaging collision may be increased.

Accordingly, it would be advantageous, for example, to have a closingplate mechanism which reduces the risk of a damaging collision betweenthe liquid confinement structure of a projection apparatus and a closingplate on a substrate table.

According to an aspect of the invention, there is provided alithographic apparatus, comprising:

a substrate table constructed to hold a substrate;

a projection system configured to project a patterned radiation beamonto a target portion of the substrate;

a receptacle in the substrate table configured to have a closing plate;and

a displacement mechanism provided in the substrate table arranged tomove a closing plate from or toward the receptacle.

According to another aspect of the invention, there is provided alithographic apparatus, comprising:

a substrate table constructed to hold a substrate;

a projection system configured to project a patterned radiation beamonto a target portion of the substrate;

a receptacle in the substrate table configured to contain a closingplate and having a depth; and

an adjustment plate arranged to vary the depth of the receptacle.

According to another aspect of the invention, there is provided a devicemanufacturing method, comprising:

projecting a patterned beam of radiation through a liquid, which iscontained by a liquid confinement structure, onto a substrate held by asubstrate table; and

after projecting the patterned beam, moving the substrate table to aposition such that a closing plate on the substrate table is positionedunder the liquid confinement structure, and

while the substrate table is held stationary relative to the liquidconfinement structure, moving the closing plate to close a portion ofthe liquid confinement structure.

According to an aspect of the invention, there is provided a substratetable for a lithographic apparatus, the substrate table comprising:

a support surface configured to hold a substrate;

a receptacle configured to contain a closing plate; and

a displacement mechanism provided in the substrate table arranged tomove a closing plate from or toward the receptacle.

According to an aspect of the invention, there is provided alithographic apparatus, comprising:

a substrate table constructed to hold a substrate;

a projection system configured to project a patterned radiation beamonto a target portion of the substrate;

a liquid supply system configured to at least partly fill a spacebetween the projection system and the substrate with a liquid, theliquid supply system comprising a liquid confinement structureconfigured to at least partly confide the liquid within the space;

a closing plate configured to close off the liquid confinement structureso as to retain a fluid in the liquid confinement structure when thesubstrate or the substrate table is no longer adjacent the liquidconfinement structure; and

a displacement mechanism provided in the substrate table arranged tomove the closing plate from or toward the liquid confinement structure.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of exampleonly, with reference to the accompanying schematic drawings in whichcorresponding reference symbols indicate corresponding parts, and inwhich:

FIG. 1 depicts a lithographic apparatus according to an embodiment ofthe invention;

FIGS. 2 and 3 depict a liquid supply system for use in a lithographicprojection apparatus;

FIG. 4 depicts another liquid supply system for use in a lithographicprojection apparatus;

FIG. 5 depicts a further liquid supply system for use in a lithographicprojection apparatus;

FIG. 6 a depicts a plan view of two substrate tables, one of which isunder the projection system of a lithographic projection apparatus;

FIG. 6 b depicts a side view of the first substrate table WT1 of FIG. 6a;

FIG. 7 a depicts a plan view of the two substrate tables shown in FIG. 6a with the projection system above the closing plate of the secondsubstrate table WT2;

FIG. 7 b depicts a side view of the second substrate table WT2 of FIG. 7a;

FIG. 8 depicts a closing plate with a displacement mechanism accordingto a first embodiment of the present invention;

FIG. 9 depicts a closing plate with a displacement mechanism accordingto a second embodiment of the present invention; and

FIG. 10 depicts a closing plate and an adjustment plate in a closingplate receptacle.

DETAILED DESCRIPTION

FIG. 1 schematically depicts a lithographic apparatus according to oneembodiment of the invention. The apparatus comprises:

-   an illumination system (illuminator) IL configured to condition a    radiation beam PB (e.g. UV radiation or DUV radiation).-   a support structure (e.g. a mask table) MT constructed to hold a    patterning device (e.g. a mask) MA and connected to a first    positioner PM configured to accurately position the patterning    device in accordance with certain parameters;-   a substrate table (e.g. a wafer table) WT constructed to hold a    substrate (e.g. a resist-coated wafer) W and connected to a second    positioner PW configured to accurately position the substrate in    accordance with certain parameters; and-   a projection system (e.g. a refractive projection lens system) PL    configured to project a pattern imparted to the radiation beam PB by    patterning device MA onto a target portion C (e.g. comprising one or    more dies) of the substrate W.

The illumination system may include various types of optical components,such as refractive, reflective, magnetic, electromagnetic, electrostaticor other types of optical components, or any combination thereof, fordirecting, shaping, or controlling radiation.

The support structure holds the patterning device in a manner thatdepends on the orientation of the patterning device, the design of thelithographic apparatus, and other conditions, such as for examplewhether or not the patterning device is held in a vacuum environment.The support structure can use mechanical, vacuum, electrostatic or otherclamping techniques to hold the patterning device. The support structuremay be a frame or a table, for example, which may be fixed or movable asrequired. The support structure may ensure that the patterning device isat a desired position, for example with respect to the projectionsystem. Any use of the terms “reticle” or “mask” herein may beconsidered synonymous with the more general term “patterning device.”

The term “patterning device” used herein should be broadly interpretedas referring to any device that can be used to impart a radiation beamwith a pattern in its cross-section such as to create a pattern in atarget portion of the substrate. It should be noted that the patternimparted to the radiation beam may not exactly correspond to the desiredpattern in the target portion of the substrate, for example if thepattern includes phase-shifting features or so called assist features.Generally, the pattern imparted to the radiation beam will correspond toa particular functional layer in a device being created in the targetportion, such as an integrated circuit.

The patterning device may be transmissive or reflective. Examples ofpatterning devices include masks, programmable mirror arrays, andprogrammable LCD panels. Masks are well known in lithography, andinclude mask types such as binary, alternating phase-shift, andattenuated phase-shift, as well as various hybrid mask types. An exampleof a programmable mirror array employs a matrix arrangement of smallmirrors, each of which can be individually tilted so as to reflect anincoming radiation beam in different directions. The tilted mirrorsimpart a pattern in a radiation beam which is reflected by the mirrormatrix.

The term “projection system” used herein should be broadly interpretedas encompassing any type of projection system, including refractive,reflective, catadioptric, magnetic, electromagnetic and electrostaticoptical systems, or any combination thereof, as appropriate for theexposure radiation being used, or for other factors such as the use ofan immersion liquid or the use of a vacuum. Any use of the term“projection lens” herein may be considered as synonymous with the moregeneral term “projection system”.

As here depicted, the apparatus is of a transmissive type (e.g.employing a transmissive mask). Alternatively, the apparatus may be of areflective type (e.g. employing a programmable mirror array of a type asreferred to above, or employing a reflective mask).

The lithographic apparatus may be of a type having two (dual stage) ormore substrate tables (and/or two or more mask tables). In such“multiple stage” machines the additional tables may be used in parallel,or preparatory steps may be carried out on one or more tables while oneor more other tables are being used for exposure.

Referring to FIG. 1, the illuminator IL receives a radiation beam from aradiation source SO. The source and the lithographic apparatus maybeseparate entities, for example when the source is an excimer laser. Insuch cases, the source is not considered to form part of thelithographic apparatus and the radiation beam is passed from the sourceSO to the illuminator IL with the aid of a beam delivery system BDcomprising, for example, suitable directing mirrors and/or a beamexpander. In other cases the source may be an integral part of thelithographic apparatus, for example when the source is a mercury lamp.The source SO and the illuminator IL, together with the beam deliverysystem BD if required, may be referred to as a radiation system.

The illuminator IL may comprise an adjuster AD for adjusting the angularintensity distribution of the radiation beam. Generally, at least theouter and/or inner radial extent (commonly referred to as σ-outer andσ-inner, respectively) of the intensity distribution in a pupil plane ofthe illuminator can be adjusted. In addition, the illuminator IL maycomprise various other components, such as an integrator IN and acondenser CO. The illuminator may be used to condition the radiationbeam, to have a desired uniformity and intensity distribution in itscross-section.

The radiation beam PB is incident on the patterning device (e.g., maskMA), which is held on the support structure (e.g., mask table MT), andis patterned by the patterning device. Having traversed the mask MA, theradiation beam PB passes through the projection system PL, which focusesthe beam onto a target portion C of the substrate W. With the aid of thesecond positioner PW and position sensor IF (e.g. an interferometricdevice, linear encoder or capacitive sensor), the substrate table WT canbe moved accurately, e.g. so as to position different target portions Cin the path of the radiation beam PB. Similarly, the first positioner PMand another position sensor (which is not explicitly depicted in FIG. 1)can be used to accurately position the mask MA with respect to the pathof the radiation beam PB, e.g. after mechanical retrieval from a masklibrary, or during a scan. In general, movement of the mask table MT maybe realized with the aid of a long-stroke module (coarse positioning)and a short-stroke module (fine positioning), which form part of thefirst positioner PM. Similarly, movement of the substrate table WT mayberealized using a long-stroke module and a short-stroke module, whichform part of the second positioner PW. In the case of a stepper (asopposed to a scanner) the mask table MT may be connected to ashort-stroke actuator only, or may be fixed. Mask MA and substrate W maybe aligned using mask alignment marks M1, M2 and substrate alignmentmarks P1, P2. Although the substrate alignment marks as illustratedoccupy dedicated target portions, they may be located in spaces betweentarget portions (these are known as scribe-lane alignment marks).Similarly, in situations in which more than one die is provided on themask MA, the mask alignment marks may be located between the dies.

The depicted apparatus could be used in at least one of the followingmodes:

1. In step mode, the mask table MT and the substrate table WT are keptessentially stationary, while an entire pattern imparted to theradiation beam is projected onto a target portion C at one time (i.e. asingle static exposure). The substrate table WT is then shifted in the Xand/or Y direction so that a different target portion C can be exposed.In step mode, the maximum size of the exposure field limits the size ofthe target portion C imaged in a single static exposure.

2. In scan mode, the mask table MT and the substrate table WT arescanned synchronously while a pattern imparted to the radiation beam isprojected onto a target portion C (i.e. a single dynamic exposure). Thevelocity and direction of the substrate table WT relative to the masktable MT may be determined by the (de-)magnification and image reversalcharacteristics of the projection system PL. In scan mode, the maximumsize of the exposure field limits the width (in the non-scanningdirection) of the target portion in a single dynamic exposure, whereasthe length of the scanning motion determines the height (in the scanningdirection) of the target portion.

3. In another mode, the mask table MT is kept essentially stationaryholding a programmable patterning device, and the substrate table WT ismoved or scanned while a pattern imparted to the radiation beam isprojected onto a target portion C. In this mode, generally a pulsedradiation source is employed and the programmable patterning device isupdated as required after each movement of the substrate table WT or inbetween successive radiation pulses during a scan. This mode ofoperation can be readily applied to maskless lithography that utilizesprogrammable patterning device, such as a programmable mirror array of atype as referred to above.

Combinations and/or variations on the above described modes of use orentirely different modes of use may also be employed.

A further immersion lithography solution with a localized liquid supplysystem is shown in FIG. 4. Liquid is supplied by two groove inlets IN oneither side of the projection system PL and is removed by a plurality ofdiscrete outlets OUT arranged radially outwardly of the inlets TN. Theinlets IN and OUT can be arranged in a plate with a hole in its centerand through which the projection beam is projected. Liquid is suppliedby one groove inlet IN on one side of the projection system PL andremoved by a plurality of discrete outlets OUT on the other side of theprojection system PL, causing a flow of a thin film of liquid betweenthe projection system PL and the substrate W. The choice of whichcombination of inlet IN and outlets OUT to use can depend on thedirection of movement of the substrate W (the other combination of inletIN and outlets OUT being inactive).

Another immersion lithography solution with a localized liquid supplysystem solution which has been proposed is to provide the liquid supplysystem with a liquid confinement structure which extends along at leasta part of a boundary of the space between the final element of theprojection system and the substrate table. Such a system is shown inFIG. 5. The liquid confinement structure is substantially stationaryrelative to the projection system in the XY plane though there may besome relative movement in the Z direction (in the direction of theoptical axis). A seal is formed between the liquid confinement structureand the surface of the substrate. In an embodiment, the seal is acontactless seal such as a gas seal. Such a system with a gas seal isdisclosed in U.S. patent application Ser. No. 10/705,783, herebyincorporated in its entirety by reference.

FIG. 5 depicts an arrangement of a reservoir 10, which forms acontactless seal to the substrate around the image field of theprojection system so that liquid is confined to fill a space between thesubstrate surface and the final element of the projection system. Aliquid confinement structure 12 positioned below and surrounding thefinal element of the projection system PL forms the reservoir. Liquid isbrought into the space below the projection system and within the liquidconfinement structure 12. The liquid confinement structure 12 extends alittle above the final element of the projection system and the liquidlevel rises above the final element so that a buffer of liquid isprovided. The liquid confinement structure 12 has an inner peripherythat at the upper end preferably closely conforms to the shape of theprojection system or the final element thereof and may, e.g., be round.At the bottom, the inner periphery closely conforms to the shape of theimage field, e.g., rectangular though this need not be the case.

The liquid may be confined in the reservoir by, for example, a gas seal16 between the bottom of the liquid confinement structure 12 and thesurface of the substrate W. The gas seal is formed by gas, e.g. air,synthetic air, N₂ or an inert gas, provided under pressure via inlet 15to the gap between liquid confinement structure 12 and substrate andextracted via first outlet 14. The overpressure on the gas inlet 15,vacuum level on the first outlet 14 and geometry of the gap are arrangedso that there is a high-velocity gas flow inwards that confines theliquid. It will be understood by the person skilled in the art thatother types of seal could be used to contain the liquid.

When the substrate W is removed, the gas seal may form between theliquid confinement structure and the substrate table. In an embodiment,the gas seal is relied upon as little as possible since the more it isused, the greater the risk of dry spots on the final element of theprojection system or gas bubbles in the liquid. As little exposure aspossible to external gases is desired to prevent dry spots on theprojection system. Alternative methods of confining the liquid may beused such as a mechanical method.

FIGS. 6 a and 6 b show a first substrate table WT1 in a position atwhich substrate W may be exposed. The projection system PL is positionedabove the substrate W on the first substrate table WT1. This firstsubstrate table WT1 also contains a closing plate 30 in a receptacle 40on the substrate table. The second substrate table WT2 has an emptyclosing plate receptacle 40.

FIGS. 7 a and 7 b show the substrate tables WT1, WT2 during a substrateswap process. The closing plate 30 has replaced the substrate W in itsposition below the liquid confinement structure 12 adjacent theprojection system PL. Where the substrate was positioned below theprojection system PL, the closing plate is now coupled with the liquidconfinement structure 12. The second substrate table WT2 is moved to bepositioned adjacent to the projection system PL and to the liquidconfinement structure 12 coupled with the closing plate 30. Once thesecond substrate table WT2 is properly positioned, the closing plate 30may be put into the receptacle 40 on the second substrate table WT2 bymovement of the liquid confinement structure 12 and/or the secondsubstrate table WT2. Once the closing plate 30 is put into thereceptacle 40 on the second substrate table WT2, the second substratetable WT2 may be moved under the projection system PL in order exposethe substrate W2. Between the closing plate being coupled with theliquid confinement structure 12 and the substrate W being positionedbelow the liquid confinement structure 12, the gas seal or some otherliquid containment mechanism confines the liquid for a short time. InFIG. 7 a, the projection system and liquid confinement structure coupledwith the closing plate 30 above receptacle 40 of substrate table WT2 isgiven as reference numeral 42.

Rather than moving a substrate table WT, WT2 and/or the liquidconfinement structure 12 in order to couple the closing plate 30 withthe liquid confinement structure 12 or to decouple the closing plate 30from the liquid confinement structure 12, a displacement mechanism,examples of which are shown in FIGS. 8 and 9, may be used to move theclosing plate 30 towards and/or away from the liquid confinementstructure 12 separately from the substrate table. In an embodiment, theclosing plate may be made of metal or glass.

The mass of a closing plate may be about 10 grams, much less than themass of a substrate table which may be of the order of tens ofkilograms. Thus, for example, the force between a rising closing plateand a liquid confinement structure 12 (which optionally may bedescending toward the closing plate) will be much lower than if aheavier substrate table were raised to meet the liquid confinementstructure. If the mass of the moving component is reduced, its force isreduced and so the result of a collision between the closing plate andthe liquid confinement structure will be much less damaging than acollision between a heavier substrate table and the liquid confinementstructure.

Furthermore, a displacement mechanism for an object with a lower mass istypically easier to manufacture and run than a displacement mechanismfor an object with a greater mass. In other words, for example, it isusually easier to make a weak actuator with a low mass than a weakactuator with a large mass; and the actuation strength is whatdetermines the acceleration of the object (e.g., the closing plate orthe substrate table). The actuation of the closing plate (rather than,for example, the substrate table) may thus reduce the chance of adamaging collision with the liquid confinement structure. Additionallyor alternatively, actuation of the closing plate may mean that a weakerdisplacement mechanism, that may be cheaper and easier to manufacture,may be used rather than a stronger displacement mechanism for moving,for example, the entire substrate table.

Furthermore, the closing plate may be coupled with the liquidconfinement structure 12 more quickly because the risk of a damagingcollision may be lower (i.e. the force of the closing plate may still bereduced if its mass is reduced more than its acceleration is increased).Thus, the speed of a substrate swap may be increased and throughput timereduced.

In an embodiment, a closing plate holder may be lifted as well as theclosing plate. The closing plate holder may be, for example, a 1.5 mmthick vacuum table for a pin type displacement mechanism as discussedwith reference to FIG. 8 below. An advantage of a closing plate holderis that the closing plate may be protected from damage, which might becaused by a displacement mechanism acting directly on the closing plate.

FIG. 8 illustrates a pin type of displacement mechanism. The substratetable WT comprises a vacuum table part 70 made of a material havingsubstantially zero thermal coefficient of expansion such as Zerodur,atop of which is a so-called pimple- or burl-plate 72. Definedvertically through the table part 70 and the plate 72 are a plurality ofthrough-holes 74 (in an embodiment shown in FIG. 8, three holes areprovided of which two are shown in FIG. 8) which allow one or more pins,described below, and that are part of the displacement mechanism, tocome into engagement with a lower surface of the closing plate duringmovement of the closing plate.

The upper major surface of the plate 72 has a recessed surface whichdefines, together with the lower major face of the closing plate, alaminar underpressure chamber. When the closing plate 30 is to be heldagainst the plate 72, this chamber is evacuated by means of a pump (notshown) and passageways (also not shown) through the table part 70 andplate 72.

In an embodiment the holes 74 are arranged symmetrically, at thevertices of an equilateral triangle centered on a vertical axis Z of thesubstrate table WT and of the closing plate 30. The axis Z coincideswith the center of gravity of the closing plate 30. Coaxially within theholes 74, and consequently similarly symmetrically arranged, are threepins 76 which are of equal length and held by a rigid carrier plate 78below and substantially parallel to the plate 72 and table part 70. Theupper extremities of the pins coincide in a horizontal plane, which issubstantially parallel to the lower face of the closing plate 30.

Once the pressure in the underpressure chamber has been increased, thepins may be driven upwardly, e.g. by moving the carrier plate 78upwardly from the FIG. 8 position, to lift the closing plate from theplate 72. Similarly, the pins may be driven upwardly to meet a closingplate 30 coupled, for example, to the liquid confinement structure inorder to put the closing plate 30 in the receptacle 40. A linearactuator 80 of the pin group 76 may be used to cause the pins to projectthrough their respective holes and contact against the underside of theclosing plate, to lift the closing plate 30 clear of the plate 72 or toplace the closing plate 30 onto the plate 72. The actuator 80 may be alinear electric motor e.g. of the well-known voice-coil type. Instead ofa carrier plate 78, each of the pins may be individually movable by anactuator.

In an embodiment, one pin may be used. Further, in an embodiment, theholes 74 may not extend through the plate 72 and instead act against theplate 72 so that movement of the plate 72 causes movement of the closingplate 30 lying on top of the plate 72. As discussed above, this type ofclosing plate holder may avoid direct operation of the displacementmechanism against the closing plate 30.

FIG. 9 illustrates a displacement mechanism comprising one or morepre-stressed leaf springs actuated by one or more electromagnets. Aseparate magnet may be provided for each of a plurality of leaf springsor a single magnet may be provided for all of a plurality of leafsprings, or any other combination maybe provided. In an embodiment, theone or more leaf springs are made of steel.

FIG. 9 shows substrate table WT with a closing plate receptacle 40containing a closing plate 30. Three stressed leaf springs 60 are heldin their stressed state by electromagnets 64. When the electromagnetsare switched off, the stressed leaf springs 60 return to theirunstressed shape which is depicted by reference numeral 62, therebylifting the closing plate 30. The velocity with which the closing plate30 is lifted is determined by the unstressing returned force of the leafsprings, and the number of leaf springs used. To return a closing plate30 to the receptacle 40, the unstressed leaf spring(s) 60 may bepositioned in contact with a closing plate 30, for example, coupled tothe liquid confinement structure and then the electromagnet(s) may beengaged to stress the leaf spring(s) 60 to put the closing plate 30 intothe receptacle.

While in the embodiments described above a recessed receptacle 40 hasbeen described, it may not be necessary to provide a receptacle 40 thatis recessed. For example, the closing pate 30 may simply just lie on topof the substrate table WT in a designated receptacle 40 where thedisplacement mechanism is provided. In such a case, a gap between theliquid confinement structure 12 and the substrate W and/or substratetable WT should remain sufficiently large to avoid collision of theliquid confinement structure 12 with the closing plate 30.

FIG. 10 shows a section of a substrate table WT with a closing platereceptacle 40 containing a closing plate 30. The closing plate 30 is notthe same depth as the recessed receptacle 40 because, for instance, ithas the correct size for a closing plate receptacle 40 on a differentsubstrate table. In order to compensate for this difference in closingplate depth, an adjustment plate 50 may be used to raise the top surfaceof the closing plate 30 so that it is at substantially the same heightas the top surface of the substrate table WT. In this way, it ispossible to use a single closing plate 30 for two or more substratetables. This is because an adjustment plate 50 enables a closing plate30 always to fit in a closing plate receptacle 40 of any substratetable. The combination of the adjustment plate 50 and the closing plate30 may be moved together using the displacement mechanisms describedherein.

Under normal conditions, the depth of a recessed closing platereceptacle 40 is about of 50 to 200 microns. The liquid confinementstructure and closing plate must meet with certain tolerances in ordernot to undergo a damaging collision. In particular, the requiredtolerance for a closing plate's height (depth) relative to the surfaceof the substrate table in which it is contained should be about 5microns. An adjustment plate compensates for this range in recessedclosing plate receptacle depth by making up for the difference in therecessed receptacle depth and the depth of the closing plate.

In European Patent Application No. 03257072.3, the idea of a twin ordual stage immersion lithography apparatus is disclosed. Such anapparatus is provided with two tables for supporting a substrate.Leveling measurements are carried out with a table at a first position,without immersion liquid, and exposure is carried out with a table at asecond position, where immersion liquid is present. Alternatively, theapparatus has only one table

Although specific reference may be made in this text to the use oflithographic apparatus in the manufacture of ICs, it should beunderstood that the lithographic apparatus described herein may haveother applications, such as the manufacture of integrated opticalsystems, guidance and detection patterns for magnetic domain memories,flat-panel displays, liquid-crystal displays (LCDs), thin-film magneticheads, etc. The skilled artisan will appreciate that, in the context ofsuch alternative applications, any use of the terms “wafer” or “die”herein may be considered as synonymous with the more general terms“substrate” or “target portion”, respectively. The substrate referred toherein may be processed, before or after exposure, in for example atrack (a tool that typically applies a layer of resist to a substrateand develops the exposed resist), a metrology tool and/or an inspectiontool. Where applicable, the disclosure herein may be applied to such andother substrate processing tools. Further, the substrate may beprocessed more than once, for example in order to create a multi-layerIC, so that the term substrate used herein may also refer to a substratethat already contains multiple processed layers.

Although specific reference may have been made above to the use ofembodiments of the invention in the context of optical lithography, itwill be appreciated that the invention may be used in otherapplications, for example imprint lithography, and where the contextallows, is not limited to optical lithography. In imprint lithography, atopography in a patterning device defines the pattern created on asubstrate. The topography of the patterning device may be pressed into alayer of resist supplied to the substrate whereupon the resist is curedby applying electromagnetic radiation, heat, pressure or a combinationthereof. The patterning device is moved out of the resist leaving apattern in it after the resist is cured.

The terms “radiation” and “beam” used herein encompass all types ofelectromagnetic radiation, including ultraviolet (V) radiation (e.g.having a wavelength of or about 365, 248, 193, 157 or 126 nm) andextreme ultra-violet (EUV) radiation (e.g. having a wavelength in therange of 5-20 nm), as well as particle beams, such as ion beams orelectron beams.

The term “lens”, where the context allows, may refer to any one orcombination of various types of optical components, includingrefractive, reflective, magnetic, electromagnetic and electrostaticoptical components.

While specific embodiments of the invention have been described above,it will be appreciated that the invention may be practiced otherwisethan as described. For example, the invention may take the form of acomputer program containing one or more sequences of machine-readableinstructions describing a method as disclosed above, or a data storagemedium (e.g. semiconductor memory, magnetic or optical disk) having sucha computer program stored therein.

One or more embodiments of the present invention may be applied to anyimmersion lithography apparatus, in particular, but not exclusively, tothose types mentioned above. A liquid supply system is any mechanismthat provides a liquid to a space between the projection system and thesubstrate and/or substrate table. It may comprise any combination of oneor more structures, one or more liquid inlets, one or more gas inlets,one or more gas outlets, and/or one or more liquid outlets, thecombination providing and confining the liquid to the space. In anembodiment, a surface of the space may be limited to a portion of thesubstrate and/or substrate table, a surface of the space may completelycover a surface of the substrate and/or substrate table, or the spacemay envelop the substrate and/or substrate table.

The descriptions above are intended to be illustrative, not limiting.Thus, it will be apparent to one skilled in the art that modificationsmay be made to the invention as described without departing from thescope of the claims set out below.

1.-33. (canceled)
 34. A lithographic apparatus comprising: at least twotables, of which at least one is constructed to hold a substrate, eachof at least two of the tables comprising a receptacle constructed andarranged to receive a closing member; a projection system configured toproject a patterned radiation beam onto a target portion of thesubstrate; and a liquid confinement structure configured to provide aliquid between a final element of the projection system and thesubstrate during projection.
 35. The lithographic apparatus of claim 34,wherein the liquid confinement structure is constructed and arranged tocouple with the closing member.
 36. The lithographic apparatus of claim34, further comprising a displacement mechanism configured to displacethe closing member from at least one of the tables.
 37. The lithographicapparatus of claim 34, wherein each of the receptacles further containsan adjustment plate configured to raise the closing member.
 38. Thelithographic apparatus of claim 34, further comprising a controllerconfigured to cause transfer of a closing member between at least twotables.
 39. A device manufacturing method of exposing, using aprojection system, a substrate supported by a first table; the exposureoccurring by the projection of a patterned beam through a liquid whichis contained by a liquid confinement structure onto the substrate, themethod comprising: after completion of exposures on the substrate,moving the first table to a position such that a closing member of thefirst table is positioned under the liquid confinement structure; whilethe first table is under the liquid confinement structure, coupling theclosing member to the liquid confinement structure; moving a secondtable to a position under the liquid confinement structure and theclosing member coupled to the liquid confinement structure; and whilethe second table is under the liquid confinement structure and theclosing member, transferring the closing member from the liquidconfinement structure to the second table.
 40. The method of claim 39,wherein the second table comprises a receptacle and transferring theclosing member from the liquid confinement structure to the second tablecomprises transferring the closing member to the receptacle.
 41. Alithographic apparatus comprising: a first table constructed to hold asubstrate; a second table; a projection system configured to project apatterned radiation beam onto a target portion of the substrate; aliquid confinement structure configured to provide a liquid between afinal element of the projection system and the substrate duringprojection; and a closing member configured to be coupled to the liquidconfinement structure, wherein the apparatus is configured to transferthe closing member between the first and second tables via the liquidconfinement structure.
 42. The lithographic apparatus of claim 41,wherein each of the first and second tables has a receptacle configuredto receive the closing member.
 43. The lithographic apparatus of claim41, wherein the liquid confinement structure is configured to couplewith the closing member.
 44. The lithographic apparatus of claim 41,further comprising a displacement mechanism configured to move theclosing member from at least one of the tables.
 45. A lithographicapparatus comprising: a first table constructed to hold a substrate; asecond table; a projection system configured to project a patternedradiation beam onto a target portion of the substrate; a liquidconfinement structure configured to provide a liquid between a finalelement of the projection system and the substrate during projection;and a controller configured to cause the first table to move to aposition underneath the projection system for exposure and causetransfer of a closing member from the first table to the liquidconfinement structure after exposure, and configured to cause the secondtable to move to a position underneath the projection system and causetransfer of the closing member from the liquid confinement structure tothe second table.
 46. The lithographic apparatus of claim 45,constructed and arranged to expose a substrate on the second table. 47.A device manufacturing method of exposing, using a projection system, asubstrate supported by a first table; the exposure occurring by theprojection of a patterned beam through a liquid which is contained by aliquid confinement structure onto the substrate, the method comprising:moving the first table; moving a second table with respect to the firsttable; and transferring a closing member between the first table and thesecond table via the liquid confinement structure.
 48. The method ofclaim 47, comprising moving the first table or the second table to aposition such that a closing member is positioned under the liquidconfinement structure and then coupling the closing member to the liquidconfinement structure.
 49. The method of claim 47, comprising moving thefirst table or the second table to a position under the liquidconfinement structure and the closing member coupled to the liquidconfinement structure and then transferring the closing member from theliquid confinement structure to the first or second table positionedunder the liquid confinement structure.
 50. A lithographic apparatus forexposing a substrate via a projection system and a liquid, the apparatuscomprising: a first table constructed to hold a substrate; a secondtable; and a closing member arranged to be transferred to and from thefirst and second tables.
 51. The lithographic apparatus of claim 50,further comprising a liquid confinement structure configured to keepliquid between the projection system and the substrate and/or theclosing member.
 52. The lithographic apparatus of claim 51, wherein theclosing member is arranged to be transferred to and from the liquidconfinement structure.
 53. The lithographic apparatus of claim 51,configured to provide a gas seal between the liquid confinementstructure and the substrate and/or the closing member to confine theliquid.